DEPOSITION MASK METHOD OF MANUFACTURING THE SAME AND METHOD OF MANUFACTURING DISPLAY PANEL

• Main Authors: JO EUNBEE, HWANG KYU HWAN, KIM HWI, PARK SANGHA, KIM JEONGKUK, NAM KANGHYUN, JEONG DAHEE, HONG JAEMIN, JIN SEUNGMIN, LEE AREUM
• Format: Patent
• Language: English; Korean
• Published: 01.04.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

A deposition mask according to an embodiment of the present invention includes a mask body which includes a metal, in which multiple through-holes are defined, and a thickness of which is at least 50 micrometers but less than 200 micrometers. Each of the multiple through-holes includes a first through portion and a second through portion, respectively, defined in a thickness direction of the mask body. The mask body includes a first part where the first through portion is defined, and a second part where the second through portion having a smaller width than the first through portion is defined, the second part whose width increases downward in the thickness direction of the mask body. According to the present invention, it is possible to reduce the time and costs of manufacturing the deposition mask and prevent defects from generating in a display panel formed using the deposition mask. 본 발명의 일 실시예에 따른 증착 마스크는 금속을 포함하고, 복수의 관통부가 정의되고, 두께가 50 마이크로미터 이상 200 마이크로미터 이하인 마스크 본체를 포함하고, 상기 복수의 관통부 각각은 상기 마스크 본체의 두께 방향을 따라 각각 정의되는 제1 관통부 및 제2 관통부를 포함하고, 상기 마스크 본체는 상기 제1 관통부가 정의되는 제1 부분, 및 상기 제1 관통부의 폭보다 작은 폭을 가지는 상기 제2 관통부가 정의되고, 상기 마스크 본체의 상기 두께 방향을 따라 아래로 갈수록 폭이 증가하는 제2 부분을 포함하여, 증착 마스크의 제조 공정의 시간 및 비용이 감소될 수 있는 한편, 증착 마스크를 이용하여 형성된 표시 패널에 불량이 발생하는 것이 방지될 수 있다.