PRODUCING METHOD OF MASK AND PRODUCING METHOD OF TEMPLATE FOR SUPPORTING MASK AND PRODUCING METHOD OF MASK INTEGRATED FRAME

• Main Authors: LEE BYUNG IL, KIM BONG JIN
• Format: Patent
• Language: English; Korean
• Published: 16.03.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention relates to a mask manufacturing method, a mask support template manufacturing method, and a frame integrated mask manufacturing method. The mask manufacturing method according to the present invention comprises the steps of: (a) forming a patterned first insulating portion on a...