TRANSPORTATION APPARATUS AND TRANSPORTATION METHOD

It is determined whether or not a member, such as a substrate, has passed through a predetermined region by a method different from the prior art. A transportation device comprises a transportation arm, an irradiating unit, a light receiving unit, and a control device. The transportation arm transpo...

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Bibliographic Details
Main Authors AMIKURA NORIHIKO, KITA MASATOMO
Format Patent
LanguageEnglish
Korean
Published 08.03.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:It is determined whether or not a member, such as a substrate, has passed through a predetermined region by a method different from the prior art. A transportation device comprises a transportation arm, an irradiating unit, a light receiving unit, and a control device. The transportation arm transports a member. The irradiating unit irradiates light obliquely to a passage region through which the member passes when the member is transported by the transportation arm. The light receiving section receives the light irradiated from the irradiating unit and reflected by the member when the member passes through the passage region. The control device determines whether the member has passed through the passage region according to whether or not the light irradiated from the irradiating unit has been received by the light receiving unit. (과제) 종래와는 상이한 방법으로 기판 등의 부재가 미리 정하여진 영역을 통과하였는지 여부를 판정한다. (해결 수단) 반송 장치는, 반송 암과, 조사부와, 수광부와, 제어 장치를 구비한다. 반송 암은, 부재를 반송한다. 조사부는, 반송 암에 의해 부재가 반송될 때에 부재가 통과하는 통과 영역에 대하여 비스듬하게 광을 조사한다. 수광부는, 부재가 통과 영역을 통과할 때에, 조사부로부터 조사되고, 부재에 반사된 광을 수광한다. 제어 장치는, 조사부로부터 조사된 광이 수광부에 의해 수광되었는지 여부에 따라, 부재가 통과 영역을 통과하였는지 여부를 판정한다.
Bibliography:Application Number: KR20210109177