Roller device for transferring a substrate with static elimination function

• Main Author: JANG, JAE SEOK
• Format: Patent
• Language: English; Korean
• Published: 07.03.2022
• Subjects: BLASTING; CONVEYING; CYLINDERS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HANDLING THIN OR FILAMENTARY MATERIAL; HEATING; LIGHTING; MECHANICAL ENGINEERING; NATURALLY-OCCURRING ELECTRICITY; PACKING; PERFORMING OPERATIONS; PISTONS; PNEUMATIC TUBE CONVEYORS; SEALINGS; SHOP CONVEYOR SYSTEMS; STATIC ELECTRICITY; STORING; THERMAL INSULATION IN GENERAL; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING; WEAPONS

The present invention relates to a roller mechanism for a substrate transfer having a static electricity removal function. Transfer rollers are individually made of a current-carriable resin material in a hollow structure. A rotary shaft is made of a corrosion-resistant material in a hollow structure to have an outer circumference thereof combined with the transfer rollers, wherein through holes are formed on the parts combined with the transfer rollers, respectively. A conductive pipe body is made of a conductive material in a hollow structure to be combined in the rotary shaft. Elastic contact members are made of a conductive material to be brought into elastic contact with the transfer rollers and the conductive pipe body to enable current carriage between the transfer rollers and the conductive pipe body, while kept inserted in the through holes of the rotary shaft respectively. A conductive block is made of a conductive material to be combined with one end of the conductive pipe body to be current-carriable with the conductive pipe body. An earthing module is combined with the conductive block through one end of the rotary shaft to earth the conductive block. Therefore, the present invention is capable of effectively removing static electricity. 본 발명은 정전기 제거 기능을 갖는 기판 이송용 롤러 기구에 관한 것이다. 이송 롤러들은 통전 가능한 수지 재질로 중공 구조로 각각 이루어진다. 회전 샤프트는 내식성 재질로 중공 구조로 이루어져 이송 롤러들을 바깥쪽 둘레에 결합하며, 이송 롤러들을 결합하는 부위들에 관통홀들이 각각 형성된다. 도전성 관체는 도전성 재질로 중공 구조로 이루어져 회전 샤프트 내에 결합된다. 탄성 접촉부재들은 도전성 재질로 이루어져 회전 샤프트의 관통홀들에 각각 삽입된 상태로 이송 롤러들과 도전성 관체에 탄성력으로 접촉되어 이송 롤러들을 도전성 관체와 통전시킨다. 도전성 블록은 도전성 재질로 이루어져 도전성 관체와 통전되게 도전성 관체의 한쪽 단부에 결합된다. 접지 모듈은 회전 샤프트의 한쪽 단부를 통해 도전성 블록에 결합되어 도전성 블록을 접지시킨다.