ETCHANT COMPOSITION MANUFACTURING METHOD OF WIRE AND ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

• Main Authors: LEE EUN WON, CHOI YONG SUK, MIN KYUNG CHAN
• Format: Patent
• Language: English; Korean
• Published: 17.02.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DIFFUSION TREATMENT OF METALLIC MATERIAL; FREQUENCY-CHANGING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25; NON-LINEAR OPTICS; NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

The present invention relates to a metal film etchant composition, a wire forming method using the metal film etchant composition, and a manufacturing method of an array substrate for a liquid crystal display device. According to the present invention, the etchant composition comprises hydrogen peroxide, a fluorine compound, an azole compound, a water-soluble compound having a nitrogen atom and a carboxyl group in one molecule, a phosphate compound, and a sulfate compound. One between the phosphate compound and the sulfate compound comprises ammonium salt. When it is represented that Y = [(water-soluble compound content) + (sulfate compound content)]/[(fluorine compound content) + (phosphate compound content)], a value of the Y is 16 or more and 200 or less. 본 발명은 금속막 식각액 조성물, 및 상기 식각액 조성물을 이용한 배선 형성 방법 및 액정표시장치용 어레이 기판의 제조 방법에 관한 것으로서, 본 발명에 따른 식각액 조성물은, 과산화수소, 불소 화합물, 아졸계 화합물, 한 분자 내에 질소원자와 카르복실기를 갖는 수용성 화합물, 인산염 화합물, 및 황산염 화합물을 포함하며, 상기 인산염 화합물 및 상기 황산염 화합물 중 어느 하나는 암모늄염을 포함하고, "Y=[(수용성 화합물 함량)+(황산염 화합물 함량)]/[(불소 화합물 함량)+(인산염 화합물 함량)]"이라 할 때, Y 값이 16 이상 200 이하인 것을 특징으로 한다.