SIMULATION METHOD SIMULATION APPARATUS FILM FORMING APPARATUS ARTICLE MANUFACTURING METHOD AND NON-TRANSITORY STORAGE MEDIUM

• Main Authors: OGUCHI YUICHIRO, AIHARA SENTARO, KATSUTA KEN
• Format: Patent
• Language: English; Korean
• Published: 07.02.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CALCULATING; CINEMATOGRAPHY; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

Provided, in the present invention, is a simulation method that makes a plurality of droplets of a curable composition disposed on a first member come in contact with a second member, and predicts a behavior of the curable composition in a treatment for forming a film of the curable composition in a space between the first member and the second member. As a step of determining a second range for executing a second simulation that predicts the behavior with a second degree of precision higher than that of a first degree of precision, the method comprises: a step of determining a second range, wherein the second range is included in a first range for executing a first simulation for predicting the behavior with the first degree of precision and the second range is smaller than that of the first range; a step of executing a second simulation in the second range; and a step of displaying a result of the second simulation executed in the second range. 본 발명은 제1 부재 상에 배치된 경화성 조성물의 복수의 액적을 제2 부재와 접촉시키고 제1 부재와 제2 부재 사이의 공간에 경화성 조성물의 막을 형성하는 처리에서 경화성 조성물의 거동을 예측하는 시뮬레이션 방법을 제공하며, 상기 방법은 거동을 제1 정밀도보다 높은 제2 정밀도로 예측하는 제2 시뮬레이션을 실행하기 위한 제2 범위를 결정하는 단계로서, 제2 범위는 거동을 제1 정밀도로 예측하는 제1 시뮬레이션을 실행하기 위한 제1 범위에 포함되고 제2 범위는 제1 범위보다 작은, 제2 범위를 결정하는 단계, 제2 범위에서 제2 시뮬레이션을 실행하는 단계, 및 제2 범위에서 실행된 제2 시뮬레이션의 결과를 표시하는 단계를 포함한다.