MASK AND METHOD FOR MANUFACTURING MASK

• Main Authors: PARK YOUNGHO, LEE YOUNGCHUL, SONG SEUNGYONG, CHOI YOUNGSUCK, JO JUNHO
• Format: Patent
• Language: English; Korean
• Published: 07.02.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

According to an embodiment of the present invention, a method for manufacturing a mask includes the steps of: providing a mask frame in which a plurality of cell opening parts are defined onto a stage; providing the cell opening parts with a cell mask material in which a plurality of first regions and second regions disposed around the first regions are defined; emitting a laser beam to the second region to harden the second region; and forming cell masks disposed in the cell opening parts by removing the first regions. 본 발명의 일 실시 예에 따르면, 마스크 제조 방법은, 복수 개의 셀 개구부들이 정의된 마스크 프레임을 스테이지 상에 제공하는 단계, 상기 셀 개구부들에 복수 개의 제1 영역들 및 상기 제1 영역들 각각의 주변에 배치된 제2 영역이 정의된 셀 마스크 재료를 제공하는 단계, 상기 제2 영역을 경화시키기 위해 상기 제2 영역에 레이저 빔을 조사하는 단계, 및 상기 제1 영역들을 제거하여 상기 셀 개구부들에 배치된 셀 마스크들을 형성하는 단계를 포함한다.