Multiple overlapped Heater for evaporator

• Main Authors: SEO HYUN, JEONG YONG WON, CHOI, MYUNG WOON, PARK EUN SIK, YOUN YUNGSIK, NA YOUNGHYUCK
• Format: Patent
• Language: English; Korean
• Published: 04.02.2022
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention is to provide a heater for an evaporation source with higher heating efficiency. In accordance with the above object, the present invention arranges heating wires on the outer wall of a crucible so as to be wound one time by reciprocating in the vertical direction, and again, arranges a heating wire in an overlapping manner so as to be positioned in a gap between the heating wires. 본 발명의 목적은 좀 더 가열 효율을 높인 증착원용 히터를 제공하고자 하는 것이다. 상기 목적에 따라 본 발명은 도가니 외벽에 열선을 수직방향으로 왕복하며 1회 감듯이 배열 하고, 다시 열선 사이 간격에 열선이 오도록 중첩적으로 배열한 다중 히터를 제공한다.