피처리 작업편을 고정하기 위한 이동가능 작업편 캐리어 디바이스

• Main Authors: GWEHENBERGER JUERGEN, KRASSNITZER SIEGFRIED
• Format: Patent
• Language: Korean
• Published: 24.01.2022
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

진공 처리 시스템의 진공 챔버에 설치되는 작업편 캐리어 디바이스로서, 상기 작업편 캐리어 디바이스는, - 직경(dx)을 가지는 하나의 캐러셀(X), - 캐러셀(X)에 장착할 수 있는, 직경(dYm<dx)을 가지는 하나 또는 다수의 캐러셀(Ym), - 상기 하나 또는 다수의 캐러셀(Ym)에 장착할 수 있는, 직경(dZn≤dYm)을 가지는 하나 또는 다수의 작업편 지지대(Zn), 및- 액추에이터(A1)와 액추에이터(A2)를 포함한다. Work piece carrier device to be installed in a vacuum chamber of a vacuum treatment system, comprising:one carousel X with a diameter dX,one or multiple carousels Ym with a diameter dYm<dX, which are mountable on carousel Xone or multiple work piece supports Zn with diameters dZn≤dYm, which are mountable on the one or multiple carousels Ym,two actuators A1 and A2.