LASER BONDED DEVICES LASER BONDING TOOLS AND RELATED METHODS

• Main Authors: SONG YUN SEOK, PARK DONG HYEON, KIM MIN HO, RYU DONG SU, JU WOO KYUNG, NA SEOK HO, KIM CHOONG HOE
• Format: Patent
• Language: English; Korean
• Published: 30.12.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present disclosure provides a bonding tool and a method for bonding a semiconductor device. In one embodiment of the present invention, a system may comprise a laser assisted bonding (lab) tool that includes a stage block and a laser source opposite the stage block. The stage block may be config...