보론 타입 첨가제를 포함한 50 nm 이하의 라인-간격 치수를 갖는 패터닝된 재료의 처리시 패턴 붕괴를 회피하는 조성물

• Main Authors: BRILL MARCEL, CSIHONY SZILARD, LOEFFLER DANIEL, PIRRUNG FRANK, BERGELER MAIKE, ENGELBRECHT LOTHAR, BOYKO VOLODYMYR, WILKE PATRICK, BURK YENI
• Format: Patent
• Language: Korean
• Published: 21.12.2021
• Subjects: ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES; APPARATUS SPECIALLY ADAPTED THEREFOR; CANDLES; CHEMISTRY; CINEMATOGRAPHY; DETERGENT COMPOSITIONS; DETERGENTS; ELECTROGRAPHY; FATTY ACIDS THEREFROM; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; MICROSTRUCTURAL TECHNOLOGY; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; RECOVERY OF GLYCEROL; RESIN SOAPS; SOAP OR SOAP-MAKING; TRANSPORTING; USE OF SINGLE SUBSTANCES AS DETERGENTS

본 발명은 하기를 포함하는 비수성 조성물에 관한 것이다: (a) 유기 용매, 및 (b) 식 (I) 의 적어도 하나의 첨가제: JPEGpct00006.jpg29141 식에서 R1, R2, R3, 및 R4 는 독립적으로 C1 내지 C10 알킬, C1 내지 C11 알킬카르보닐, C6 내지 C12 아릴, C7 내지 C14 알킬아릴, 및 C7 내지 C14 아릴알킬로부터 선택되고; 그리고 n 은 0 또는 1 이다. Described herein is a non-aqueous composition including(a) an organic solvent, and(b) at least one additive of formulae I,where R1, R2, R3, and R4 are independently selected from C1 to C10 alkyl, C1 to C11 alkylcarbonyl, C6 to C12 aryl, C7 to C14 alkylaryl, and C7 to C14 arylalkyl; and n is 0 or 1.