Open-ended type substrate receiving cassette and system thereof

A cassette is provided. A frame and a slot included in the cassette for receiving a substrate can be opened or closed, thereby minimizing a height gap between the slots in the cassette. A cassette according to some embodiments is a cassette for receiving a substrate. The cassette comprises: a plural...

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Bibliographic Details
Main Author KIM YOON SU
Format Patent
LanguageEnglish
Korean
Published 14.12.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A cassette is provided. A frame and a slot included in the cassette for receiving a substrate can be opened or closed, thereby minimizing a height gap between the slots in the cassette. A cassette according to some embodiments is a cassette for receiving a substrate. The cassette comprises: a plurality of slots stacked in a first direction; and a frame connected to the plurality of slots and extended in the first direction. The plurality of slots and the frame are opened outward to receive the substrate, and are closed inward after the substrate is received. 기판을 수용하는 카세트에 포함된 프레임과 슬롯이 개방 혹은 폐쇄가 가능하여, 카세트 내부의 슬롯 사이의 높이 간격을 최소화하는 카세트가 제공된다. 몇몇 실시예에 따른 카세트는 기판을 수용하는 카세트로서, 제1 방향으로 적층되는 복수의 슬롯들; 및 복수의 슬롯들과 연결되며, 제1 방향으로 연장되는 프레임을 포함하되, 복수의 슬롯들과 프레임은, 외부 방향으로 개방되어 기판을 수용하고, 기판이 수용된 후 내부 방향으로 폐쇄된다.
Bibliography:Application Number: KR20200068454