CONTROL METHOD PROGRAM IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD

A method of controlling a control device controlling a molding device operable to form a layer of a moldable material on a substrate is provided. The method comprises: an acquisition step of acquiring data defining a drop amount and a drop position of each droplet to be dropped onto a substrate; a c...

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Bibliographic Details
Main Author ISHIDA SHINGO
Format Patent
LanguageEnglish
Korean
Published 08.12.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A method of controlling a control device controlling a molding device operable to form a layer of a moldable material on a substrate is provided. The method comprises: an acquisition step of acquiring data defining a drop amount and a drop position of each droplet to be dropped onto a substrate; a calculation step of calculating the enlargement of each droplet assuming that the enlarged shape of each droplet is polygonal and calculating a surface area of an overlapping area in which the area of a concave portion to be filled with the moldable material in a mold is overlapped; and a correction step of collecting data so that the concave portion is filled with the moldable material based on a result in the calculation step. 기판 상에 성형가능 재료의 층을 형성하도록 동작가능한 성형 장치를 제어하는 제어 장치의 제어 방법이 제공된다. 상기 방법은, 액적 각각의 기판에의 적하량 및 적하 위치를 규정하는 데이터를 취득하는 취득 단계, 액적 각각의 확대 형상이 다각형인 것을 상정하여 액적 각각의 확대를 계산하고 다각형으로 확대된 액적의 영역 및 몰드에서의 성형가능 재료로 충전되어야 할 오목부의 영역이 중첩되는 중첩 영역의 표면적을 계산하는 계산 단계, 및 계산 단계에서의 결과에 기초하여 오목부가 성형가능 재료로 충전되도록 데이터를 보정하는 단계를 포함한다.
Bibliography:Application Number: KR20210065281