METHOD OF FABRICATING SEMICONDUCTOR DEVICES HAVING DIFFERENT ARCHITECTURES AND SEMICONDUCTOR DEVICES FABRICATED THEREBY
A method of manufacturing a semiconductor device based on a dual architecture compatible design includes the steps of: forming a transistor component in a transistor (TR) layer; and performing one of a step (A) of manufacturing an additional component according to a buried power rail (BPR) type arch...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English Korean |
Published |
08.12.2021
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Subjects | |
Online Access | Get full text |
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