METHOD OF FABRICATING SEMICONDUCTOR DEVICES HAVING DIFFERENT ARCHITECTURES AND SEMICONDUCTOR DEVICES FABRICATED THEREBY

A method of manufacturing a semiconductor device based on a dual architecture compatible design includes the steps of: forming a transistor component in a transistor (TR) layer; and performing one of a step (A) of manufacturing an additional component according to a buried power rail (BPR) type arch...

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Bibliographic Details
Main Authors CHANG TZU CHING, CHEN WEI CHIH, FU CHIN MING, HSIEH CHENG HSIANG, CHEN CHUNG HUI, SHEEN RUEY BIN, CHEN WAN TE
Format Patent
LanguageEnglish
Korean
Published 08.12.2021
Subjects
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