IMPRINT APPARATUS

An imprint apparatus includes: an ejection unit configured to eject a liquid on a substrate; a storage unit for storing a plurality of ejecting conditions for the ejection unit; and a control unit controlling the ejection unit based on the ejecting conditions stored in the storage unit, wherein the...

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Bibliographic Details
Main Author KATSUTA KEN
Format Patent
LanguageEnglish
Korean
Published 07.12.2021
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:An imprint apparatus includes: an ejection unit configured to eject a liquid on a substrate; a storage unit for storing a plurality of ejecting conditions for the ejection unit; and a control unit controlling the ejection unit based on the ejecting conditions stored in the storage unit, wherein the control unit selects an ejecting condition from the plurality of ejecting conditions according to an ejection interval for ejecting the liquid. The imprint apparatus can suppress variation in ejection speed and amount caused by change of an ejection interval after mounting a dispenser. 임프린트 장치는, 기판 상에 액체를 토출하도록 구성되는 토출 유닛; 상기 토출 유닛에 대한 복수의 토출 조건을 저장하는 저장 유닛; 및 상기 저장 유닛에 저장된 토출 조건에 기초하여 상기 토출 유닛을 제어하는 제어 유닛을 포함하며, 상기 제어 유닛은 상기 액체를 토출하는 토출 간격에 따라 복수의 토출 조건으로부터 토출 조건을 선택한다.
Bibliography:Application Number: KR20210165187