3 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES

• Main Authors: KIM CHAEHO, LEE SANGSOO, LEE WOOSUNG, JEE JUNGGEUN, NAM PHIL OUK
• Format: Patent
• Language: English; Korean
• Published: 19.10.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A three-dimensional semiconductor memory device is provided. The device comprises: a carbon-containing layer on a substrate; electrode interlayer insulating films and electrode layers alternately stacked on the carbon-containing layer; a cell vertical pattern penetrating at least a portion of the el...