METHOD FOR PREPARING AND/OR PERFORMING THE SEPARATION OF A SUBSTRATE ELEMENT AND SUBSTRATE SUB-ELEMENT

The present invention relates to a method for preparing and/or performing separation of a substrate element into at least two substrate subelements along a separation plane, and particularly, to the substrate subelements which are manufactured and/or can be manufactured by using a method according t...

Full description

Saved in:
Bibliographic Details
Main Authors ORTNER ANDREAS, SOHR DAVID, WAGNER FABIAN
Format Patent
LanguageEnglish
Korean
Published 16.09.2021
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:The present invention relates to a method for preparing and/or performing separation of a substrate element into at least two substrate subelements along a separation plane, and particularly, to the substrate subelements which are manufactured and/or can be manufactured by using a method according to the present invention. The method of the present invention comprises: a provision step; and a control step. 본 발명은 분리면을 따라 적어도 2개의 기판 서브엘리먼트로의 기판 엘리먼트의 분리를 준비 및/또는 수행하기 위한 방법 및 특히 본 발명에 따른 방법을 사용하여 제조되고 그리고/또는 제조될 수 있는 기판 서브엘리먼트에 관한 것이다.
Bibliography:Application Number: KR20210028148