CMP PAD CONSTRUCTION WITH COMPOSITE MATERIAL PROPERTIES USING ADDITIVE MANUFACTURING PROCESSES

• Main Authors: PATIBANDLA NAG B, BAJAJ RAJEEV, ORILALL MAHENDRA C, REDFIELD DANIEL, PERRY RUSSELL EDWARD, MENK GREGORY E, FUNG JASON G, KRISHNAN KASIRAMAN, REDEKER FRED C, DAVENPORT ROBERT E
• Format: Patent
• Language: English; Korean
• Published: 08.09.2021
• Subjects: ADDITIVE MANUFACTURING TECHNOLOGY; ADDITIVE MANUFACTURING, i.e. MANUFACTURING OFTHREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVEAGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING,STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TOOLS FOR GRINDING, BUFFING, OR SHARPENING; TRANSPORTING

본 개시내용의 실시예들은 일반적으로 복합 패드 바디를 포함하는 폴리싱 패드들, 및 이러한 폴리싱 패드들을 형성하기 위한 방법들을 제공한다. 일 실시예는 복합 패드 바디를 포함하는 폴리싱 패드를 제공한다. 복합 패드 바디는 제1 재료나 제1 재료 조성물로 형성된 하나 이상의 제1 피쳐; 및 제2 재료나 제2 재료 조성물로 형성된 하나 이상의 제2 피쳐를 포함하고, 하나 이상의 제1 피쳐 및 하나 이상의 제2 피쳐는, 제1 재료나 제1 재료 조성물 및 제2 재료나 제2 재료 조성물을 포함하는 복수의 층을 퇴적함으로써 형성된다. Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.