NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION

• Main Authors: HATANAKA TADASHI, UCHIYAMA MEGUMI, SUGANO YUTA, ISHIDA TOMOHISA
• Format: Patent
• Language: English; Korean
• Published: 27.08.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

[과제] 경화속도가 증대하고, 15μm 이상의 막두께여도 기재의 이면으로부터의 노광으로 도막 표면을 충분히 경화시키는 것이 가능해져, 미세한 투명구조체를 형성할 수 있는 네가티브형 감광성 수지 조성물을 제공하는 것에 있다. [해결수단] 하기 (A)성분, (B)성분, (C-1)성분, (C-2)성분 및 (D)성분을 함유하는 감광성 수지 조성물. (A)성분: 알칼리 가용성 공중합체, (B)성분: 아크릴레이트기, 메타크릴레이트기, 비닐기 및 알릴기로 이루어진 군으로부터 선택되는 적어도 1종의 중합성기를 2개 이상 갖는 화합물, (C-1)성분: 옥심에스테르기를 가지며, 365nm에 있어서의 메탄올 중 또는 아세토니트릴 중의 흡광계수가 5,000ml/g·cm 이상인 광개시제, (C-2)성분: 365nm에 있어서의 메탄올 중 또는 아세토니트릴 중의 흡광계수가 100ml/g·cm 이하인 광개시제, (D)성분: 용제. [Problem] To provide a negative photosensitive resin composition which has an increased curing speed, which allows fully curing the surface of a coated film with exposure light from the rear surface of the substrate even when the film thickness is 15μm or greater, and which can form detailed transparent structure. [Solution] This photosensitive resin composition contains a component (A), a component (B), a component (C-1), a component (C-2) and a component (D). Component (A) is an alkali-soluble copolymer; component (B) is a compound having two or more polymerizable bases of at least one type selected from a group consisting of an acrylate group, a methacrylate group, a vinyl group and an allyl group; component (C-1) is a photoinitiator which has an oxime ester group and a light absorption coefficient in methanol or in acetonitrile at 365nm of 5,000ml/g*cm or greater; component (C-2) is a photoinitiator which has a light absorption coefficient in methanol or in acetonitrile at 365nm of 100ml/g*cm or less; and component (D) is a solvent.