OLED OLED A METAL SUBSTRATE FOR DEPOSITION MASK FOR OLED PIXEL DEPOSITION AND OLED PIXEL DEPOSITION MASK

• Main Author: LEE SANG YU
• Format: Patent
• Language: English; Korean
• Published: 26.08.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMICAL SURFACE TREATMENT; CHEMISTRY; CINEMATOGRAPHY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; MATERIALS THEREFOR; METALLURGY; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

According to an embodiment, provided is a metal substrate for a deposition mask, which is a metal substrate for an OLED deposition mask including one surface and the other surface opposite to the one surface. The metal substrate includes Invar. The metal substrate includes first grooves and second grooves formed in at least one surface of the one surface and the other surface. The maximum depth of the first grooves is 3 ㎛ to 4 ㎛, the maximum depth of the second grooves is 1 ㎛ to 1.5 ㎛, and the number of the second grooves is 80% or more of the sum of the number of the first grooves and the second grooves. 실시예에 따른 증착 마스크용 금속 기판은, 일면 및 상기 일면과 반대되는 타면을 포함하는 OLED 증착 마스크용 금속 기판으로서, 상기 금속 기판은 인바를 포함하고, 상기 금속 기판은 상기 일면 및 상기 타면 중 적어도 하나의 면에 형성되는 제 1 홈 및 제 2 홈을 포함하고, 상기 제 1 홈의 최대 깊이는 3㎛ 내지 4㎛이고, 상기 제 2 홈의 최대 깊이는 1㎛ 내지 1.5이고, 상기 제 2 홈의 수는 상기 제 1 홈 및 상기 제 2 홈의 합의 수에 대해 80% 이상이다.