ALLOY SPRAYED FILM AND FILM DEPOSITION APPARATUS

• Main Authors: KADOWAKI YUTAKA, AKASE JINEI, YOSHIDA TOSHINOBU
• Format: Patent
• Language: English; Korean
• Published: 24.08.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The present invention provides an alloy spray coating whose exfoliation is suppressed from a film deposition treating component, and a film deposition apparatus having the alloy spray coating. For example, a spray coating is used in a film deposition apparatus comprising: a film deposition source; a board support unit facing the film deposition source; a film deposition treating component which surrounds the film deposition source or a film deposition treating atmosphere between the film deposition source and the board support unit; and a vacuum container containing the film deposition source, the board support unit, and the film deposition treating component. The present invention provides the spray coating where an alloy spray coating having at least one of a first element between aluminum, scandium, and hafnium is installed toward the film deposition treating atmosphere. 막 형성 처리용 부품으로부터의 박리를 더욱 억제시킨 합금 용사막, 및, 그 합금 용사막을 구비한 막 형성 장치를 제공하는 것에 있다. 예를 들면, 막 형성원과, 상기 막 형성원에 대향하는 기판 지지부와, 상기 막 형성원과 상기 기판 지지부 사이의 막 형성 처리 분위기, 또는 상기 막 형성원을 둘러싸는 막 형성 처리용 부품과, 상기 막 형성원, 상기 기판 지지부, 및 상기 막 형성 처리용 부품을 수용하는 진공용기를 구비하는 막 형성 장치에 사용되는 용사막으로서, 알루미늄과, 스칸듐 및 하프늄의 적어도 어느 하나의 제1 원소를 가지는 합금 용사막이 상기 막 형성 처리 분위기를 향해서 설치된 용사막이 제공된다.