ELECTRET

An electret (1) comprises a substrate (10) and an electret layer (2) formed on a surface of the substrate. The electret layer is a composite metal compound comprising two or more different metal elements, and is obtained by processing polarization of a thin film mainly composed of an inorganic diele...

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Main Authors KOZAWA YOSHIHIRO, MATSUSHITA NORIYUKI, KANOH KAZUHIKO, TANAKA YUMI
Format Patent
LanguageEnglish
Korean
Published 23.06.2021
Subjects
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
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Summary:An electret (1) comprises a substrate (10) and an electret layer (2) formed on a surface of the substrate. The electret layer is a composite metal compound comprising two or more different metal elements, and is obtained by processing polarization of a thin film mainly composed of an inorganic dielectric material having a band gap energy of 4 eV or more. Therefore, the present invention is capable of allowing an electrical material to be delaminated due to a difference in coefficient of thermal expansion with the substrate or other films on the substrate. 일렉트릿(1)은 기판(10) 및 기판의 표면 상에 형성되는 일렉트릿층(2)을 포함한다. 일렉트릿층은 2개 이상의 상이한 금속 원소를 포함하는 복합 금속 화합물이며, 4 eV 이상의 밴드갭 에너지를 갖는 무기 유전체 재료로 주로 구성되는 박막을 분극 처리함으로써 얻어진다.
Bibliography:Application Number: KR20200173215