STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE WITH STRESSOR

• Main Authors: CHIANG KUO CHENG, JU SHI NING, CHEN GUAN LIN, WANG CHIH HAO
• Format: Patent
• Language: English; Korean
• Published: 11.05.2021
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device structure and a method for forming the semiconductor device structure are provided. The semiconductor device structure includes a plurality of semiconductor nanostructures on a substrate and two epitaxial structures on the substrate. Each of the semiconductor nanostructures is...