EVAPORATION SOURCE APPARATUS FILM FORMING APPARATUS FILM FORMING METHOD AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

• Main Authors: KAZAMA YOSHIAKI, KONDO YOSHINARI
• Format: Patent
• Language: English; Korean
• Published: 06.04.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Provided are an evaporation source apparatus, a film forming apparatus, a film forming method, and a method for manufacturing an electronic device, which can support a plurality of heaters enclosing a container in a multiple way so that the heaters are supported to be prevented from contacting each other and efficiently heat a deposition material in the container. The evaporation source apparatus is provided with the container in which the deposition material is accommodated, and the plurality of heaters multiply installed around the container. In the plurality of heaters, a heater wire is configured in a spiral shape, and a first support member disposed between a first heater and a second heater adjacent to each other among the plurality of heaters is provided. The first support member has a first heater wire support part which supports the heater wire of one heater of the first heater and the second heater. [과제] 용기를 다중으로 둘러싸는 복수의 히터를, 히터끼리 접촉하지 않도록 지지하고, 효율적으로 용기 내의 증착 재료를 가열할 수 있는 증발원 장치, 성막 장치, 성막 방법 및 전자 디바이스의 제조 방법을 제공한다. [해결 수단] 증착 재료가 수용되는 용기와, 상기 용기의 주위에 다중으로 설치되는 복수의 히터를 구비한 증발원 장치에 있어서, 상기 복수의 히터는, 히터선이 나선 형상으로 구성되어 있고, 상기 복수의 히터 중 서로 이웃하는 제1 히터와 제2 히터의 사이에 배치되는 제1 지지 부재를 구비하고, 상기 제1 지지 부재는, 상기 제1 히터와 상기 제2 히터 중 일방의 히터의 히터선을 지지하는 제1 히터선 지지부를 갖는 것을 특징으로 한다.