FOCUSED ION BEAM APPARATUS

Provided is a focused ion beam device which can grasp at least a direction in which a focused ion beam strikes a sample table for fixing a sample, before actual irradiation with the focused ion beam. The focused ion beam device (100) comprises: a focused ion beam lens barrel (20) for irradiating a s...

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Bibliographic Details
Main Authors MOCHIZUKI TOSHIHIRO, ISHII HARUYUKI, UEMOTO ATSUSHI
Format Patent
LanguageEnglish
Korean
Published 02.04.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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