STAGE APPARATUS LITHOGRAPHY APPARATUS AND METHOD OF MAUNFACTURING ARTICLE

Provided is a stage apparatus advantageous for high-precision positioning of a fine-motion stage. The stage apparatus includes a coarse-motion stage, a fine motion stage, an electronic actuator disposed between the coarse-motion stage and the fine-motion stage to apply thrust to the fine-motion stag...

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Bibliographic Details
Main Author KURIHARA TAKASHI
Format Patent
LanguageEnglish
Korean
Published 30.03.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:Provided is a stage apparatus advantageous for high-precision positioning of a fine-motion stage. The stage apparatus includes a coarse-motion stage, a fine motion stage, an electronic actuator disposed between the coarse-motion stage and the fine-motion stage to apply thrust to the fine-motion stage in a direction along a surface of the coarse-motion stage, and a control unit for controlling the electronic actuator, wherein the control unit determines a control parameter of the electronic actuator according to a driving start position of the coarse-motion stage. [과제] 미동 스테이지의 위치결정의 고정밀도화에 유리한 스테이지 장치를 제공한다. [해결 수단] 스테이지 장치는, 조동 스테이지와, 미동 스테이지와, 상기 조동 스테이지와 상기 미동 스테이지와의 사이에 배치되어, 상기 조동 스테이지의 표면에 따르는 방향으로 상기 미동 스테이지에 추력을 주는 전자 액추에이터와, 상기 전자 액추에이터를 제어하는 제어부를, 갖고, 상기 제어부는, 상기 조동 스테이지의 구동시작 위치에 따라서 상기 전자 액추에이터의 제어 파라미터를 결정한다.
Bibliography:Application Number: KR20200110821