Wafer mounting device and operating method thereof

The present invention provides a wafer mounting device which can extend pump life. The wafer mounting device comprises: a plate on which a wafer is mounted; a lid opening and closing a chamber; a pressing unit pressing a block with the wafer; a heater generating heat; a temperature sensor measuring...

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Bibliographic Details
Main Authors KIM YUN GOO, KIM YOUNG JIN
Format Patent
LanguageEnglish
Korean
Published 10.03.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:The present invention provides a wafer mounting device which can extend pump life. The wafer mounting device comprises: a plate on which a wafer is mounted; a lid opening and closing a chamber; a pressing unit pressing a block with the wafer; a heater generating heat; a temperature sensor measuring a temperature in the chamber; and a control unit. The control unit controls to heat the heater to keep the temperature in the chamber constant based on the measured temperature in the chamber. 웨이퍼 마운팅 장치는 웨이퍼가 안착되는 플레이트와, 챔버를 개폐시키는 리드와, 블록을 웨이퍼로 가압하는 가압부와, 열을 발생시키는 히터와, 챔버 내의 온도를 측정하는 온도 센서와, 제어부를 포함한다. 제어부는 측정된 챔버 내의 온도에 기초하여 챔버 내의 온도를 일정하게 유지하기 위해 히터를 가열하도록 제어한다.
Bibliography:Application Number: KR20190105644