입자 코팅 방법들 및 장치

• Main Authors: NARWANKAR PRAVIN K, FRANKEL JONATHAN, GANGAKHEDKAR KAUSHAL, NEIKIRK COLIN C
• Format: Patent
• Language: Korean
• Published: 03.03.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

입자들을 코팅하기 위한 반응기는 코팅될 입자들을 유지하도록 구성된 진공 챔버, 진공 챔버의 배출구를 통해 진공 챔버로부터 가스를 배기하기 위한 진공 포트, 프로세스 가스를 진공 챔버 상의 가스 유입구를 통해 입자들 내로 유동시키도록 구성된 화학물질 전달 시스템, 진공 챔버의 제1 장착 표면 상에 위치된 하나 이상의 진동 액추에이터, 및 하나 이상의 진동 액추에이터로 하여금, 진공 챔버 내에 유지되는 입자들에 진동 운동을 유도하기에 충분한 진동 운동을 진공 챔버에 생성하게 하도록 구성된 제어기를 포함한다. A reactor for coating particles includes a vacuum chamber configured to hold particles to be coated, a vacuum port to exhaust gas from the vacuum chamber via the outlet of the vacuum chamber, a chemical delivery system configured to flow a process gas into the particles via a gas inlet on the vacuum chamber, one or more vibrational actuators located on a first mounting surface of the vacuum chamber, and a controller configured to cause the one or more vibrational actuators to generate a vibrational motion in the vacuum chamber sufficient to induce a vibrational motion in the particles held within the vacuum chamber.