정전 척 장치 및 정전 척 장치의 제조 방법

• Main Authors: MORISHITA NORITO, KUGIMOTO HIRONORI
• Format: Patent
• Language: Korean
• Published: 30.11.2020
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

이 정전 척 장치는, 일주면이 판상 시료를 재치하는 재치면인 기체와, 기체에 있어서, 재치면과는 반대 측 또는 기체의 내부에 마련된 정전 흡착용 전극을 구비하고, 정전 흡착용 전극은, 절연성을 갖는 매트릭스상과, 매트릭스상보다 체적 고유 저항값이 낮은 분산상을 포함하는 복합 소결체로 이루어지며, 복합 소결체의 임의의 단면에 있어서, 매트릭스상으로 주위가 둘러싸여 독립하는 분산상의 영역은, 최대 페렛 직경이 30μm 이상인 응집부를 포함하고, 응집부는, 임의의 단면에 있어서의 2500μm2의 범위에 있어서 하나 이상 존재한다. The electrostatic chuck device includes: a base having one main surface serving as a mounting surface on which a plate-shaped sample is mounted; and an electrode for electrostatic attraction provided on a side opposite to the mounting surface in the base or in an interior of the base, in which the electrode for electrostatic attraction is made of a composite sintered body that includes a matrix phase having insulation properties and a dispersed phase having a lower volume resistivity value than the matrix phase, in any cross section of the composite sintered body, a region of the dispersed phase, which is surrounded by the matrix phase and is independent, includes aggregated portions having a maximum Feret diameter of 30 μm or more, and one or more of the aggregated portions are present in a range of 2500 μm2 in any cross section of the sintered body.