STAMP REPLICATION DEVICE AND METHOD FOR PRODUCING A HOLDING MEANS FOR A STAMP REPLICATION DEVICE AS WELL AS A STAMP

• Main Authors: VOGLER UWE, MAY CHRISTIAN, FINK GEORG, JALALI GHAZAHLEH, PAWLITZEK FABIAN
• Format: Patent
• Language: English; Korean
• Published: 19.11.2020
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Provided are a stamp duplication device and a method of producing a holding device and a stamp for a stamp duplication device, capable of producing a stamp within a short time with constantly high quality. A stamp duplication device (10) for producing a stamp for production of microstructured components and/or nanostructured components includes: a platform (14); a cover (12) which is positionable on the platform (14); and a holding device (32) for a stamp carrier (28), wherein the holding device (32) is provided on the cover (12) or on the platform (14), and includes a carrier (33) as well as a microstructured vacuum surface (34) on the carrier (33) to hold the stamp carrier (28). In addition, the method of producing the holding device (32) for the stamp duplication device (10) as well as the method of producing the stamp are specified. 마이크로구조화된 구성요소 및/또는 나노구조화된 구성요소의 생산을 위한 스탬프를 생산하기 위한 스탬프 복제 장치(10)로서, 플랫폼(14), 상기 플랫폼(14) 상에 위치가능한 커버(12) 및 스탬프 캐리어(28)를 위한 홀딩 수단(32)을 포함하고, 상기 홀딩 수단(32)은 커버(12) 상에 또는 플랫폼(14) 상에 제공되며 캐리어(33) 뿐만 아니라 스탬프 캐리어(28)를 홀드하기 위해 캐리어(33) 상에서 마이크로구조화된 진공 표면(34)을 포함한다. 또한, 스탬프 복제 장치(10)를 위한 홀딩 수단(32)을 생산하기 위한 방법 뿐만 아니라 스탬프를 제조하기 위한 방법이 특정된다.