CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

An objective of the present invention is to automate processing. A charged particle beam device comprises: an image identity degree determination unit determining whether identity degree is equal to or greater than a predetermined value, wherein the identity degree indicates degree of identity betwe...

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Bibliographic Details
Main Authors UEMOTO ATSUSHI, MURAKI AYANA, ASAHATA TATSUYA
Format Patent
LanguageEnglish
Korean
Published 07.10.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:An objective of the present invention is to automate processing. A charged particle beam device comprises: an image identity degree determination unit determining whether identity degree is equal to or greater than a predetermined value, wherein the identity degree indicates degree of identity between a processing cross-section image, which is an SEM image obtained through observation of a cross-section of a sample by a scanning electron microscope, and a criterion image, which is a processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit. [과제] 가공을 자동화한다. [해결 수단] 하전 입자 빔 장치는, 시료의 단면이 주사형 전자현미경에 의해 관찰되어 얻어지는 SEM 화상인 가공 단면 화상과, 미리 등록된 가공 단면 화상인 판정 기준 화상의 일치의 정도를 나타내는 일치도가 소정의 값 이상인지 여부를 판정하는 화상 일치도 판정부와, 화상 일치도 판정부의 판정 결과에 따라 소정의 처리를 행하는 판정 후 처리부를 구비한다.
Bibliography:Application Number: KR20190163625