정제된 형상 및 미세구조를 갖는 구리 합금 스퍼터링 타겟을 형성하는 방법
구리 망간 빌렛이 제1 일방향 단조 단계를 거치게 하는 단계, 약 650℃ 내지 약 750℃의 온도로 구리 망간 빌렛을 가열하는 단계, 구리 망간 빌렛이 제2 일방향 단조 단계를 거치게 하는 단계, 및 약 500℃ 내지 약 650℃의 온도로 구리 망간 빌렛을 가열하여 구리 합금을 형성하는 단계를 포함하는, 구리 망간 스퍼터링 타겟을 형성하는 방법. A method of forming a copper manganese sputtering target including subjecting a copper manganese billet...
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Main Authors | , , , , |
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Format | Patent |
Language | Korean |
Published |
10.09.2020
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Abstract | 구리 망간 빌렛이 제1 일방향 단조 단계를 거치게 하는 단계, 약 650℃ 내지 약 750℃의 온도로 구리 망간 빌렛을 가열하는 단계, 구리 망간 빌렛이 제2 일방향 단조 단계를 거치게 하는 단계, 및 약 500℃ 내지 약 650℃의 온도로 구리 망간 빌렛을 가열하여 구리 합금을 형성하는 단계를 포함하는, 구리 망간 스퍼터링 타겟을 형성하는 방법.
A method of forming a copper manganese sputtering target including subjecting a copper manganese billet to a first unidirectional forging step, heating the copper manganese billet to a temperature from about 650° C. to about 750° C., subjecting the copper manganese billet to a second unidirectional forging step, and heating the copper manganese billet to a temperature from about 500° C. to about 650° C. to form a copper alloy. |
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AbstractList | 구리 망간 빌렛이 제1 일방향 단조 단계를 거치게 하는 단계, 약 650℃ 내지 약 750℃의 온도로 구리 망간 빌렛을 가열하는 단계, 구리 망간 빌렛이 제2 일방향 단조 단계를 거치게 하는 단계, 및 약 500℃ 내지 약 650℃의 온도로 구리 망간 빌렛을 가열하여 구리 합금을 형성하는 단계를 포함하는, 구리 망간 스퍼터링 타겟을 형성하는 방법.
A method of forming a copper manganese sputtering target including subjecting a copper manganese billet to a first unidirectional forging step, heating the copper manganese billet to a temperature from about 650° C. to about 750° C., subjecting the copper manganese billet to a second unidirectional forging step, and heating the copper manganese billet to a temperature from about 500° C. to about 650° C. to form a copper alloy. |
Author | ALFORD FRANK C UNDERWOOD PATRICK TURNER ERIK L NOLANDER IRA G FERRASSE STEPHANE |
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Snippet | 구리 망간 빌렛이 제1 일방향 단조 단계를 거치게 하는 단계, 약 650℃ 내지 약 750℃의 온도로 구리 망간 빌렛을 가열하는 단계, 구리 망간 빌렛이 제2 일방향 단조 단계를 거치게 하는 단계, 및 약 500℃ 내지 약 650℃의 온도로 구리 망간 빌렛을 가열하여 구리 합금을... |
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SubjectTerms | AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKINGWITHOUT ESSENTIALLY REMOVING MATERIAL CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES,OTHERWISE THAN BY ROLLING MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVINGMATERIAL METALLURGY PERFORMING OPERATIONS PUNCHING METAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING |
Title | 정제된 형상 및 미세구조를 갖는 구리 합금 스퍼터링 타겟을 형성하는 방법 |
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