Bulk-acoustic wave resonator

According to an embodiment of the present invention, a bulk acoustic wave resonator capable of improving performance comprises: a substrate; a resonance unit including a first electrode, a piezoelectric layer, and a second electrode stacked on the substrate, a center unit, and an extension unit disp...

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Bibliographic Details
Main Authors LEE TAE KYUNG, SHIN RAN HEE, KIM SUNG SUN, KYOUNG JE HONG, SON JIN SUK, LEE HWA SUN
Format Patent
LanguageEnglish
Korean
Published 25.08.2020
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:According to an embodiment of the present invention, a bulk acoustic wave resonator capable of improving performance comprises: a substrate; a resonance unit including a first electrode, a piezoelectric layer, and a second electrode stacked on the substrate, a center unit, and an extension unit disposed along the circumference of the center unit; and an insertion layer disposed between the first electrode and the piezoelectric layer in the extension unit. The insertion layer is composed of aluminum alloy containing scandium (Sc). 본 발명의 실시예에 따른 체적 음향 공진기는, 기판, 상기 기판 상에 제1 전극, 압전층, 제2 전극이 적층되고, 중앙부와 상기 중앙부의 둘레를 따라 배치되는 확장부로 구성되는 공진부, 및 상기 확장부에서 상기 제1 전극과 상기 압전층 사이에 배치되는 삽입층을 포함하며, 상기 삽입층은 스칸듐(Sc)을 함유하는 알루미늄 합금으로 구성된다.
Bibliography:Application Number: KR20190017637