CLEANING SHEET AND CARRYING MEMBER WITH A CLEANING FUNCTION

• Main Author: FUKAMICHI YUICHI
• Format: Patent
• Language: English; Korean
• Published: 07.08.2020
• Subjects: BASIC ELECTRIC ELEMENTS; CLEANING; CLEANING IN GENERAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; SEMICONDUCTOR DEVICES; TRANSPORTING

The present invention provides a cleaning sheet excellent in foreign matter removal performance and transparency which can be suitably used for a carrying member carried in a substrate processing apparatus. In addition, the present invention provides a cleaning function-added carrying member having such a cleaning sheet and a conveying member and excellent in the foreign matter removal performance and transparency. As the cleaning sheet having a cleaning layer, in the cleaning sheet of the present invention, transmittance at 400 nm of the cleaning layer is equal to or more than 50%, and transmittance at 400 nm after exposure of the cleaning layer in an environment at 200°C for 3 hours is equal to or more than 50%. [과제] 기판 처리 장치 내에 반송하는 반송 부재에 적합하게 이용할 수 있는, 이물 제거 성능 및 투명성이 우수한 클리닝 시트를 제공한다. 또한, 그와 같은 클리닝 시트와 반송 부재를 갖는, 이물 제거 성능 및 투명성이 우수한 클리닝 기능 부가 반송 부재를 제공한다. [해결 수단] 본 발명의 클리닝 시트는, 클리닝층을 구비하는 클리닝 시트로서, 해당 클리닝층의 400nm에 있어서의 투과율이 50% 이상이고, 해당 클리닝층의 200℃의 환경하에 3시간 노출한 후의 400nm에 있어서의 투과율이 50% 이상이다.