method for multi-level etch semiconductor sensing device AND METHOD for MANUFACTURING semiconductor sensing device

• Main Authors: LEE CHENG CHE, CHEN LIN CHIEN
• Format: Patent
• Language: English; Korean
• Published: 29.07.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present disclosure provides a method for multi-level etching. The method comprises the steps of: providing a substrate; forming a first reference feature over a control region of the substrate; forming an etchable layer over the first reference feature and a target region over the substrate; pat...