ETCHING SOLUTION AND METHOD OF PRODUCING SEMICONDUCTOR DEVICE
The present invention relates to an etching solution for selectively etching a compound represented by chemical formula Si_1-xGe_x (wherein x is more than 0 and less than 1) with respect to Si, Ge, and oxides thereof and, more specifically, to an etching solution containing periodic acid and fluorid...
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Main Authors | , , |
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Format | Patent |
Language | English Korean |
Published |
07.07.2020
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to an etching solution for selectively etching a compound represented by chemical formula Si_1-xGe_x (wherein x is more than 0 and less than 1) with respect to Si, Ge, and oxides thereof and, more specifically, to an etching solution containing periodic acid and fluoride.
Si, Ge, 및 이들의 산화물에 대해 일반식 SiGe로 나타내는 화합물 (단, x 는 0 초과 1 미만이다) 을 선택적으로 에칭 처리하기 위한 에칭액으로서, 과요오드산과 불화물을 함유하는, 에칭액. |
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Bibliography: | Application Number: KR20190174564 |