액정 소자의 제조 방법

• Main Authors: KOYAMA TAKAYOSHI, OKUDA RYUUICHI, UESAKA YUUSUKE
• Format: Patent
• Language: Korean
• Published: 22.04.2020
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

기판 상에 층간 절연막과 패턴 전극과 액정 배향막이 이 순서로 형성된 소자 구조에 있어서, 신뢰성이 우수한 액정 소자를 얻는다. 한 쌍의 기판 중 적어도 한쪽에 층간 절연막(21)을 형성하는 공정과, 층간 절연막(21) 상에 패턴 전극(화소 전극(19))을 형성하는 공정과, 패턴 전극 상에, 층간 절연막(21)의 적어도 일부에 접촉하도록 액정 배향막(제1 배향막(32))을 형성하는 공정을 포함하는 액정 소자의 제조 방법에 있어서, 액정 배향막을, 중합체 성분과, 특정의 용제군으로부터 선택되는 적어도 1종의 용제를 함유하는 액정 배향제를 이용하여 형성한다. The present invention makes it possible to obtain a liquid crystal element that exhibits superior reliability with an element structure in which an interlayer insulating film, patterned electrodes, and a liquid crystal alignment film are formed in this order on a substrate. In a method for manufacturing a liquid crystal element, the method including: a step for forming an interlayer insulating film 21 on at least one of a pair of substrates; a step for forming patterned electrodes (pixel electrodes 19) on the interlayer insulating film 21; and a step for forming a liquid crystal alignment film (first alignment film 32) on the patterned electrodes such that the liquid crystal alignment film is in contact with at least a portion of the interlayer insulating film 21, the liquid crystal alignment film is formed by using a liquid crystal alignment agent containing a polymer component and at least one kind of solvent selected from a specific set of solvents.