A REFILLING SYSTEM OF CHEMICAL FOR SEMI-CONDUCT

• Main Authors: LEE IK JUNG, JEON SEUNG SOO
• Format: Patent
• Language: English; Korean
• Published: 30.12.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; WEIGHING

The present invention relates to a chemical filling system for manufacturing a semiconductor, and more specifically, to a chemical filling system for manufacturing a semiconductor, which is possible to precisely control the filling amount by installing a sensor measuring weight of a tank for filling chemicals used for manufacturing a semiconductor in a plurality of tanks and turning on and off a valve with high speed to change the amount introduced into the tank. According to the present invention, the chemical filling system for manufacturing a semiconductor is capable of exact use of the chemicals by exactly filling the chemicals in the tank and is possible to reduce filling time by gradually filling the exact amount of the chemicals in the plurality of tanks. 본 발명은 반도체 제조용 화학약품 충전시스템에 관한 것으로서, 보다 상세하게는 반도체 제조에 사용되는 화학약품을 복수의 탱크에 충전하기 위해 탱크의 중량을 측정하는 센서를 설치하고, 밸브를 고속으로 온오프시켜 탱크에 유입되는 양을 변화시킴으로써 충전량을 정밀하게 제어할 수 있도록 하는 반도체 제조용 화학약품 충전시스템에 관한 것이다. 본 발명에 따르면 화학약품을 탱크에 정확하게 충전함으로써 화학약품의 정확한 사용이 가능해지며, 복수의 탱크에 순차적으로 정확한 양의 화학약품을 충전함으로써 충전 시간을 줄일 수 있는 효과가 있다.