METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

• Main Authors: CHANG KUEI SUNG, HSIEH CHENG YU, TSAI SHANG YING, LAI FEI LUNG
• Format: Patent
• Language: English; Korean
• Published: 26.09.2019
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The present disclosure relates to a MEMS device having a patterned adhesion prevention layer and an associated forming method. The MEMS device has a handle substrate defining a first bonding surface, and a MEMS substrate having the MEMS device and defining a second bonding surface. The handle substr...