Electrode pattern forming method for electrostatic chucks

An electrode pattern is formed by thermally spraying a conductive material on a base using a mask having an intaglio pattern. The mask is printed on the base and removed after an electrode pattern is formed. The mask is wet removed using an appropriate physical force by pressure pulverizing alkaline...

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Bibliographic Details
Main Author JEONG TAE HWAN
Format Patent
LanguageEnglish
Korean
Published 24.07.2019
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:An electrode pattern is formed by thermally spraying a conductive material on a base using a mask having an intaglio pattern. The mask is printed on the base and removed after an electrode pattern is formed. The mask is wet removed using an appropriate physical force by pressure pulverizing alkaline solution. It is possible to form the electrode pattern of a micro gap. 음각 패턴을 갖는 마스크를 이용하여 베이스 위에 도전재료를 용사코팅함에 의해 전극 패턴이 형성된다. 마스크는 베이스 상에 인쇄되며, 전극 패턴 형성 후 제거된다. 마스크는 알칼리 용액을 가압 분쇄하는 방식으로 적정한 물리력을 이용하여 습식 제거된다.
Bibliography:Application Number: KR20180005431