METAL ROUTING WITH FLEXIBLE SPACE FORMED USING SELF-ALIGNED SPACER PATTERNING

• Main Authors: WU CHIA TIEN, CHU WEI CHEN, LIU HSIANG WEI
• Format: Patent
• Language: English; Korean
• Published: 08.04.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method comprises: a step of forming a hard mask on a target layer; and a step of performing treatment on a first part of the hard mask to form a treated part and to leave a second part of the hard mask as untreated. The method further comprises a step of allowing both the treated and untreated par...