METAL ROUTING WITH FLEXIBLE SPACE FORMED USING SELF-ALIGNED SPACER PATTERNING
A method comprises: a step of forming a hard mask on a target layer; and a step of performing treatment on a first part of the hard mask to form a treated part and to leave a second part of the hard mask as untreated. The method further comprises a step of allowing both the treated and untreated par...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English Korean |
Published |
08.04.2019
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!