방사선 소스

• Main Authors: HUISMAN SIMON REINALD, KUMAR NITISH
• Format: Patent
• Language: Korean
• Published: 18.02.2019
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; ELECTROGRAPHY; FREQUENCY-CHANGING; HOLOGRAPHY; MATERIALS THEREFOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

정렬 마크 측정 시스템을 위한 초연속 방사선 소스는: 방사선 소스; 조명 광학기; 복수의 도파관들; 및 수집 광학기를 포함한다. 방사선 소스는 펄스화된 방사선 빔을 생성하도록 작동가능하다. 조명 광학기는 펄스화된 펌프 방사선 빔을 수용하고, 복수의 펄스화된 서브-빔들을 형성하도록 배치되며, 각각의 펄스화된 서브-빔은 펄스화된 펌프 방사선 빔의 일부분을 포함한다. 복수의 도파관들 각각은 복수의 펄스화된 서브-빔들 중 적어도 하나를 수용하고, 그 펄스화된 서브-빔의 스펙트럼을 확장하여 초연속 서브-빔을 생성하도록 배치된다. 수집 광학기는 복수의 도파관들 각각으로부터 초연속 서브-빔을 수용하고, 이들을 조합하여 초연속 방사선 빔을 형성하도록 배치된다. A supercontinuum radiation source for an alignment mark measurement system comprises: a radiation source; illumination optics; a plurality of waveguides; and collection optics. The radiation source is operable to produce a pulsed radiation beam. The illumination optics is arranged to receive the pulsed pump radiation beam and to form a plurality of pulsed sub-beams, each pulsed sub-beam comprising a portion of the pulsed radiation beam. Each of the plurality of waveguides is arranged to receive at least one of the plurality of pulsed sub-beams beam and to broaden a spectrum of that pulsed sub-beam so as to generate a supercontinuum sub-beam. The collection optics is arranged to receive the supercontinuum sub-beam from each of the plurality of waveguides and to combine them so as to form a supercontinuum radiation beam.