Tungsten precursor and Method of forming a tungsten-containing layer using the same

• Main Authors: AOKI YUTARO, YUN, JI EUN, SHIRATORI TSUBASA, SAITO AKIO, LEE, SO YOUNG, LIM, JAE SOON
• Format: Patent
• Language: English; Korean
• Published: 27.12.2018
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; ORGANIC CHEMISTRY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

Disclosed are a tungsten precursor and a method for forming a tungsten-containing layer using the same. The tungsten precursor is designated by chemical formula 1. [chemical formula 1] In the chemical formula 1, R^1, R^2, and R^3 include an alkyl group of a straight chain form or a branch form which is C1-C5 individually and independently replaced or unreplaced. R^4 and R^5 are the alkyl group of the straight chain form or the branch form which is C1-C5, a halogen element, and a dialkyl amino group which is C2-C10 or a trialkyl silyl group which is C3-C12. n is 1 or 2, and m is 0 or 1. When n is 1, m is 1. When n is 2, m is 0. R^1 and R^2 are individually two, and two R^1s are individually independent from each other, and two R^2s are individually independent from each other. 텅스텐 전구체 및 이를 이용한 텅스텐 함유막의 형성 방법을 개시한다. 이 텅스텐 전구체는 하기 화학식 1로 표기된다. [화학식 1]상기 화학식 1에서 R, R및 R은 각각 독립적으로 치환 또는 비치환된 C1~C5인 직쇄 혹은 분기형태의 알킬기를 포함하며, R및 R는 각각 독립적으로 C1~C5인 직쇄 혹은 분기 형태의 알킬기, 할로겐 원소, C2~C10인 디알킬아미노기 또는 C3~C12인 트리알킬실릴기이고, n은 1 또는 2이고, m은 0 또는 1이다. n이 1일 때 m은 1이다. n이 2일 때, m은 0이고, R과 R는 각각 2개이고, 2개의 R은 각각 서로 독립적이고, 2개의 R는 각각 서로 독립적이다.