SUBSTRATE CONTAINER CONTROL APPARATUS AND ABNORMALITY DETECTING METHOD

According to the present invention, a contamination state in a substrate accommodating container is detected. The substrate accommodating container that accommodates a substrate includes a monitor installed inside the substrate accommodating container so as to detect a contamination state inside the...

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Bibliographic Details
Main Author NAGAIKE HIROSHI
Format Patent
LanguageEnglish
Korean
Published 18.12.2018
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:According to the present invention, a contamination state in a substrate accommodating container is detected. The substrate accommodating container that accommodates a substrate includes a monitor installed inside the substrate accommodating container so as to detect a contamination state inside the substrate accommodating container, wherein the contamination state inside the substrate accommodating container is detected. 본 발명은 기판 수납 용기의 내부의 오염 상태를 검출하는 것을 목적으로 한다. 기판을 수납하는 기판 수납 용기로서, 상기 기판 수납 용기의 내부에, 오염 상태를 검출 가능한 모니터를 갖고, 상기 기판 수납 용기의 내부의 오염 상태를 검출하는 기판 수납 용기가 제공된다.
Bibliography:Application Number: KR20180065297