Graphene Patch for Capacitive Displacement Measurement and Manufacturing Method of the Same and Capacitive Displacement Measurement System using the Same

• Main Authors: SONG, JOON YUB, KIM, YONG JIN, KIM, SEUNG MAN, KIM, HOUNG KYUNG, LEE, JAE HAK
• Format: Patent
• Language: English; Korean
• Published: 28.11.2018
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING ELECTRIC VARIABLES; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MEASURING MAGNETIC VARIABLES; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

The present invention relates to a capacitive displacement measurement system to measure fine displacement of a micro or nano unit and, more specifically, to a graphene patch for capacitive displacement measurement and a displacement measurement system using the same, which can measure displacement by using capacitance even though a target is nonconductor. 본 발명은 마이크로 또는 나노 단위의 미세 변위를 측정하기 위한 정전용량 변위 측정 시스템에 관한 것으로, 더욱 상세하게는 표적이 부도체인 경우에도 정전용량을 이용한 변위 측정이 가능한 정전용량 변위 측정용 그래핀 패치 및 이를 이용한 변위 측정 시스템에 관한 것이다.