IMPRINT APPARATUS AND METHOD OF CONTROLLING THE SAME

An imprint apparatus comprises: a discharge unit configured to discharge liquid on a substrate; a storage unit storing a plurality of discharge conditions relative to the discharge unit; and a control unit controlling the discharge unit based on the discharge conditions stored in the storage unit, w...

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Bibliographic Details
Main Author KATSUTA KEN
Format Patent
LanguageEnglish
Korean
Published 16.11.2018
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:An imprint apparatus comprises: a discharge unit configured to discharge liquid on a substrate; a storage unit storing a plurality of discharge conditions relative to the discharge unit; and a control unit controlling the discharge unit based on the discharge conditions stored in the storage unit, wherein the control unit selects the discharge condition among the discharge conditions in accordance with a discharge interval of the liquid. 임프린트 장치는, 기판 상에 액체를 토출하도록 구성되는 토출 유닛; 상기 토출 유닛에 대한 복수의 토출 조건을 저장하는 저장 유닛; 및 상기 저장 유닛에 저장된 토출 조건에 기초하여 상기 토출 유닛을 제어하는 제어 유닛을 포함하며, 상기 제어 유닛은 상기 액체를 토출하는 토출 간격에 따라 복수의 토출 조건으로부터 토출 조건을 선택한다.
Bibliography:Application Number: KR20180048289