Process for removal of bromine iodine bromine- and/or iodine-containing compounds from chlorosilanes

• Main Authors: RAULEDER HARTWIG, LANG JUERGEN ERWIN
• Format: Patent
• Language: English; Korean
• Published: 15.10.2018
• Subjects: ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMISTRY; COMPOUNDS THEREOF; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; ORGANIC CHEMISTRY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEPARATION; THEIR RELEVANT APPARATUS; TRANSPORTING

The present invention relates to a method for removing bromine, bromine- and/or iodine-containing silicon compounds from a composition of chlorosilanes containing bromine, bromine- and/or iodine-containing silicon compounds, wherein the composition is applied to nonthermal plasma and subsequently the chlorosilanes can be separated from existing bromine- and/or iodine-containing compounds by distillation. 본 발명은 브로민, 브로민- 및/또는 아이오딘-함유 규소 화합물을 함유하는 클로로실란의 조성물로부터 브로민, 브로민- 및/또는 아이오딘-함유 규소 화합물의 제거를 위한 방법으로서, 여기서 조성물은 비열적 플라즈마에 적용되고, 후속적으로 클로로실란은 존재하는 브로민- 및/또는 아이오딘-함유 화합물로부터 증류에 의해 분리될 수 있는 것인 방법에 관한 것이다.