세라믹스 적층체, 세라믹스 절연 기판, 및 세라믹스 적층체의 제조 방법

• Main Authors: UNO TOMOHIRO, KIMURA KEIICHI, TOKUHASHI KEISUKE, SATO YUTAKA
• Format: Patent
• Language: Korean
• Published: 10.09.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

우수한 내열 피로성이나, 열전도성, 절연성을 갖는 복합 세라믹스층의 기계적 특성을 높여, 우수한 내구성 및 방열성, 절연성을 가진 세라믹스 적층체, 세라믹스 절연 기판 및 세라믹 적층체의 제조 방법을 제공한다. 접합면과 직교하는 단면에 있어서, 제2 상 입자(3)의 평균 직경이 0.02㎛ 이상 0.3㎛ 이하이며, 또한 제2 상 입자(3)를 타원으로 보고 판단하였을 때의 상당 타원의 긴 직경, 짧은 직경의 비의 평균값을 2 이상 10 이하로 한다. 또한, 60％ 이상의 수의 제2 상 입자(3)가 30°이하의 배향각을 갖고, 평균 배향각이 5°이상 35°이하인 것을 특징으로 한다. A ceramic laminate improving the mechanical characteristics of a composite ceramic layer which has excellent thermal fatigue resistance, thermal conductivity, and insulation ability and having excellent durability and heat dissipation and insulation ability and a ceramic insulating substrate and a method of production of a ceramic laminate are provided. In a cross-section perpendicular to the bonding interfaces, the average size of the second phase particles 3 is 0.02 µm to 0.3 µm and the average value of the ratio of the long axis and short axis of an equivalent ellipse when viewing a second phase particle 3 as an ellipse is 2 to 10. Further, 60% or more of the number of the second phase particles 3 has an orientation angle of 30° or less while the average orientation angle is 5° to 35°.