다중 위상 교류 또는 펄스 전류에 의해 구동되는 플라즈마 장치 및 플라즈마 생성 방법

• Main Authors: MASCHWITZ PETER, CHAMBERS JOHN
• Format: Patent
• Language: Korean
• Published: 27.08.2018
• Subjects: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GLASS; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; JOINING GLASS TO GLASS OR OTHER MATERIALS; METALLURGY; MINERAL OR SLAG WOOL; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; THEIR RELEVANT APPARATUS; TRANSPORTING

플라즈마원 및 플라즈마 생성 방법이 제공된다. 플라즈마원은, 각각 플라즈마 출구 영역을 갖는 제1 중공 캐소드, 제2 중공 캐소드, 및 제3 중공 캐소드를 포함하는 적어도 3개의 중공 캐소드를 포함한다. 플라즈마원은 제1 출력 파, 제2 출력 파, 및 제3 출력 파를 포함하는 복수의 출력 파를 생성할 수 있는 전력원을 포함하며, 제1 출력 파와 제2 출력 파는 위상이 다르고, 제2 출력 파와 제3 출력 파는 위상이 다르며, 또한 제1 출력 파와 제3 출력 파는 위상이 다르다. 제1 중공 캐소드가 제1 출력 파에 전기적으로 연결되고 제2 중공 캐소드가 제2 출력 파에 전기적으로 연결되며 그리고 제3 중공 캐소드가 제3 출력 파에 전기적으로 연결되도록 각 중공 캐소드가 전력원에 전기적으로 연결된다. A plasma source and method of producing a plasma are provided. The plasma source includes at least three hollow cathodes, including a first hollow cathode, a second hollow cathode, and a third hollow cathode, each hollow cathode having a plasma exit region. The plasma source includes a source of power capable of producing multiple output waves, including a first output wave, a second output wave, and a third output wave, wherein the first output wave and the second output wave are out of phase, the second output wave and the third output wave are out of phase, and the first output wave and the third output wave are out of phase. Each hollow cathode is electrically connected to the source of power such that the first hollow cathode is electrically connected to the first output wave, the second hollow cathode is electrically connected to the second output wave, and the third is electrically connected to the third output wave.