INTERGRATED SENSOR

The present invention relates to an integrated sensor. According to an embodiment of the present invention, an integrated sensor (10) comprises: a substrate (100); a carbon electrode film (200) formed on the substrate (100), and containing a carbon material; an insulating film (300) formed on the ca...

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Bibliographic Details
Main Authors CHANG, JOON YEON, NA, DAE SEOK, CHOI, YONG SIK
Format Patent
LanguageEnglish
Korean
Published 29.06.2018
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The present invention relates to an integrated sensor. According to an embodiment of the present invention, an integrated sensor (10) comprises: a substrate (100); a carbon electrode film (200) formed on the substrate (100), and containing a carbon material; an insulating film (300) formed on the carbon electrode film (200); and a first electrode (410) and a second electrode (420) formed in at least a portion of the insulating film (300), and spaced from each other. 본 발명은 복합 센서에 관한 것이다. 본 발명의 일 실시예에 따른 복합 센서(10)는, 기판(100), 기판(100) 상에 형성되고, 탄소물질을 포함하는 탄소 전극막(200). 탄소 전극막(200) 상에 형성된 절연막(300), 절연막(300) 상의 적어도 일부에 형성되며, 상호 이격된 제1 전극(410) 및 제2 전극(420)을 포함하는 것을 특징으로 한다.
Bibliography:Application Number: KR20160175828